Fundamental limitations in microelectronics—I. MOS technology
نویسندگان
چکیده
منابع مشابه
Bipolar and MOS Technology
Integrated circuit resistors can be classified into three groups: 1.) semiconductor films, 2.) deposited metal films, and 3.) cermets (a mixture of metal and dielectric materials). Of these, only the first two have found widespread use in high frequency circuits. Semiconductor films can be fabricated by diffusion into a host semi-insulating substrate, by depositing a polysilcon layer, or by ion...
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ژورنال
عنوان ژورنال: Solid-State Electronics
سال: 1972
ISSN: 0038-1101
DOI: 10.1016/0038-1101(72)90103-7